格式:pdf
大小:4.2MB
頁數: 9頁
http://www.eiitech.net 上海馳艦半導體科技有限公司 Installing the Process Tube of Alu-Depo Stack Summarized on 07/13 Version 1.0 Parts needed -quartz parts for thermocouple and tube case -ceramic heating insulation rings -cerapaper -vacuum O-rings -VCR gaskets Proceeds with photos as follows to install the process tube: 1. Wait until the heating cassette has cooled down to room temperature,then switch